Masaki Hosoda

Masaki Hosoda

1630 E. University Blvd.,
Tucson, Arizona 85721-0094

Interests

Optical testing and test instrumentation

Education

M. S. Candidate, College of Optical Sciences, University of Arizona 2010
M. Eng., Dept. of Applied Physics, Waseda University 2002
B. S., Dept. of Applied Physics, Waseda University 2000

Experience

Canon Inc.
Optical Engineer in Electron Beam Lithography, 2002-2005
Mechanical Engineer in Optical Testing, 2005-2008

Patents

USP7173262
“Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method”
USP7105842
“Method of charged particle beam lithography and equipment for charged partcle beam lithography”
USP6870171
“Exposure apparatus”

Publications:

” Optical properties of a multibeam column with a single-electron source “, S. Tanimoto et.al., Journal of Vacuum Science and Technology B, Volume 25, Issue 1, pp. 140-146, 2007
“Electronic States of Monolayer Graphene Sheets on TiC(410), (755) and (654) Surfaces”, R. Ohno et. al., Carbon, 195, 0, 400-404, 2000

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